Electron Microscope - Yenra

Scanning transmission system with integrated aberration correction has atomic-scale resolution below .7 Angstrom

Electron Microscope

FEI's new scanning/transmission electron microscope (S/TEM), the Titan 80-300, dedicated to corrected microscopy. The new (S)TEM system is the world's most advanced commercially-available microscope, yielding atomic-scale imaging with resolution below 0.7 Angstrom. The Titan announcement comes just one year after FEI became the first developer and manufacturer of commercial electron microscopes to achieve sub-Angstrom resolution on FEI's market-leading Tecnai microscope using a monochromator and an aberration corrector.

Until now, aberration correction technologies in electron microscopes have been treated as accessory components for STEM systems that were not truly optimized for this type of advanced technology. Thus, the integration of these types of correctors for breaking the next resolution barrier and for high usability has been met with limited success.

The all-new Titan 80-300 is designed as a dedicated and highly-upgradeable aberration-corrected system that will enable corrector and monochromator technology to enter into mainstream nanotechnology research and industrial markets. The Titan (S)TEM system features unparalleled overall stability to break the 1-Angstrom barrier. Results from FEI's Nanoport in The Netherlands deliver Titan TEM information limits below 0.7 Angstrom and STEM resolution just below 1.0 Angstrom, without the addition of aberration corrector upgrades -- an achievement that has never before been demonstrated on a commercial tool. Corrector upgrades can be added for higher resolution, extending the point resolution down to the information limit for accurate interpretation of atomic structures.

The upgradeable design of the Titan enables a wide range nanotechnology and research centers to afford dedicated aberration corrected TEM technology.

"The Titan 80-300 is a significant platform for the nanotechnology era. It provides our customers a solid foundation for continued innovation and commercialization. FEI's continuing advances in ultra-high TEM resolution, coupled with our market-leading focused ion beam (FIB) technologies, deliver powerful and vital tools for researchers, developers and manufacturers who are increasingly focused on nanoscale discovery and product commercialization," said Vahe Sarkissian of FEI. "As the world's leader in providing Tools for Nanotech, FEI will continue to invest in the development of these key technologies and market platforms."

Advance orders for the new Titan (S)TEM have been in markets ranging from advanced materials, energy, and semiconductors, to advanced nanotechnology research centers in Europe and North America.

FEI's Tools for Nanotech, featuring focused ion- and electron-beam technologies, deliver 3D characterization, analysis and modification capabilities with resolution down to the sub-Angstrom level.