Cluster Probing: Find the Bottleneck in a Shared-Handler Test Cell — working record
Yenra | October 4, 2026
https://yenra.com/cluster-probe/

Purpose: Estimate usable cell capacity from module cycles, handler demand, queueing, downtime and retest requirements.

Instructions: Make a working copy. Fill the fields below with actual evidence and units. Record unavailable information as unknown, give it an owner, and resolve it before using the record for acceptance. Keep raw evidence by reference. Use the approved method, equipment limits and acceptance rules for your application. This blank record does not establish qualification.

1. Completion definition, wafer mix, recipes and module eligibility
   Response / evidence reference: ______________________________

2. Route map with shared resources, buffers and allowed concurrency
   Response / evidence reference: ______________________________

3. Module occupancy in seconds; included transfer and wait intervals
   Response / evidence reference: ______________________________

4. Exclusive handler demand in seconds per wafer; loaded and empty moves
   Response / evidence reference: ______________________________

5. Resource capacity bounds in wafers/hour and limiting resource
   Response / evidence reference: ______________________________

6. Event-log reference, common time base, queue and blocking observations
   Response / evidence reference: ______________________________

7. Unique completions, test visits, retests, downtime and elapsed hours
   Response / evidence reference: ______________________________

8. Approved recovery cases, identity reconciliation and acceptance outcome
   Response / evidence reference: ______________________________

Teaching example (fictional; not acceptance criteria):
Fictional ideal-capacity calculation Three identical modules each require 120 seconds of module occupancy per wafer, giving 3 × 3600 / 120 = 90 wafers/hour. Exclusive handler work totals 50 seconds per wafer, giving 3600 / 50 = 72 wafers/hour. The cell upper bound is therefore 72 wafers/hour before other constraints. A fourth module raises module capacity to 120 wafers/hour while the handler bound stays 72. These are capacity bounds, not achieved production rates.

Primary source context (consult for applicable method and scope):
Research on dual-arm cluster-tool scheduling
https://www.ieee-jas.net/article/doi/10.1109/JAS.2020.1003150

Review outcome: accepted / held / further evidence needed
Reviewer and date: __________________
Open actions, owner and due date: __________________